Legacy Products

 

200LU Stand Alone Wafer Presenter

  • System handles wafers and increases yield by decreasing wafer breakage, scratches and contamination.

  • Flexibility between 4"-8" wafer diameter measurements with just a switch.

  • Compact, mobile, modularized and ready to plug-in.

  • Reliable and self-contained unit, with built-in processor control making unit autonomous.

  • Convenient "pick&place" from front recess

Model EP1401, EP2601, EP3801 Edge Grinder

  • Diameter from 50mm to 200mmRound, Notched, or flatted wafers

  • Non contact thickness measuring system

  • Grind measurement station (diameter, flat length(s), notch depth, location

  • 4 cassette loading/unloading station

  • High throughput

  • Windows XP system

Model XGX-10000 Crystal-Grower

Cz Silicon Single Crystal Production

  • The Crystal-grower for 4"-8" Cz silicon crystal growth

  • Operator friendly and safety oriented design

  • Compact design and no raised floor or catwalks required - place directly on factory floor

  • Simple design for easy cleaning and maintenance

  • Crucible Capacity Max 60 KG

 

Model 4568 Wafer Elevator

  • The GigaMat Model 4568 Cassette Elevator sends and receives wafers, sizes 100mm, 125mm, 150mm and 200mm, out of or into cassettes

  • Single 24-volt DC power supply

  • The Elevator provides two means of external control: RS232C for single unit operation and RS422/485 for multi-unit operation

  • Up to 31 units may be daisy-chained for RS422/485 systems

  • The design of the elevator is modular in that all major components are removable and replaceable

  • This device utilizes micro-stepping motors (3) to minimize audible noise and provide smooth, vibration-less operation. In addition, the operating parameters of these motors (start step rate, final step rate, acceleration and deceleration) are programmable.

  • These parameters are stored in non-volatile memory.

  • The Elevator slots are programmable, which allows none standard cassettes to be used