CMP Powerhouse Automated Single wafer & Batch Process Tool

The Automated Polishing Machine “Freedom”

 

The Automated Polishing Machine “Freedom” top view labels

CMP Powerhouse Automated Single Wafer & Batch Process Tool

GigaMat Technologies' advanced turn key solution: The CMP Powerhouse Automated System

  • Modular design featuring demounting module, mounting module, carrier washer and press, and two CMP polishers

  • All modules operated by two main 6-axis robots

  • Multiple operating modes: fully autonomous, partially autonomous, manual mode, and various maintenance modes for specific machine sections

  • Power to choose number of polishers and process steps

  • Power to customize process sequence, resulting in increased productivity

  • Power to remove any polisher from the line for maintenance without affecting other process steps or automation

  • Power to achieve higher process flexibility

  • Throughput up to 240 wafers per hour

  • Design allows customers to run all polishers without automation if needed

  • RFID tracking for all carriers

  • Options:

    • a. Polishing both sides: Automatic flipping of wafers to polish the reverse side

    • b. Integrated post-polishing with third-party Megasonic and cleaning systems

 

The Automated Polishing Machine “Freedom” with 3 polishers