GigaMat Technologies’ newest turn key solution: The Automated Polishing Machine “Freedom”

• Its modular design features a demounting module, mounting module, a carrier washer and press, and two CMP polishers.

• All modules are operated by two main 6 axis robots.

• The machine has multiple modes: fully autonomous, partially autonomous, manual mode, and various different maintenance modes, depending on what section of the machine is being worked on.

• “Freedom” to choose number of polisher and steps

• “Freedom” to choose process sequence, can result in further increase in productivity

• “Freedom” Any of polishers can be removed  from the line for maintenance without effecting  other process steps or Automation

• “Freedom” Higher flexibility of process can be achieved

• Throughput can be up to 240 wafers per hour.

• The Design allow customer to run all the polishers without Automation

• RFID for all carriers

• Options:

  • a. Polishing both side: Automatic Flipping the wafer over and polishing the other side.

  • b. Integrated post polishing with third party Megasonic and Cleaning system