Chemical Delivery Systems

Description - Applies to all Slurry Systems

• Range of Slurries: SiC, CMP slurries, Diamond slurry, and more

• pH Control: Continuous monitoring and adjusting of pH in each tank

• Automatic pH probe calibration

• Slurry Recirculation: Controlled via flow pressure sensor

• Tanks: Total of 2-4 tanks

• Cleaning Solution: Two large containers dedicated for pad cleaning solution, with DI water ratio mixing

• Slurry Tanks: Slurry dispenses from one tank while new slurry is prepared in the second tank

• Nitrogen: Prevents oxidation during mixing process by blanketing the tanks, applied to partially filled tanks to displace oxygen

• Tank Cleaning: Automated clean and purge capability

• Plastic Materials: Built with FM4910 approved plastic materials

• Magnetically Levitated Low-Shear Pumps: No bearings to wear out or seals to fail, based on magnetic levitation principles

• Pump Redundancy: Duplicate components reduce stress and increase reliability

• Drum Scale: Continuous monitoring

• Drum Mixers: Pump recirculation and mixer functionality

• GEM/SECS communication

The Wall Box is GigaMat Technologies’ method for slurry system - polisher communication. The wall box provides slurry from the slurry system to the polisher, and is capable of precise flow control for up to five solutions. The wall box also has special rinse features that prevent contamination between any of the five solutions.