Description - Applies to all Slurry Systems

• Range of Slurries: Sic, CMP slurries, Diamond slurry, and more

• pH Control: Continues monitoring and adjusting pH on each tank

• Automatic pH probe calibration

• Slurry Recirculation: Recirculation of slurry controlled via flow pressure sensor

• Tanks: Total of 2-4 tanks

• Cleaning solution: Two large container is dedicated for pad cleaning solution, mixing DI water ratio…

• Slurry Tanks: slurry dispenses from one tank while new slurry is prepared in the second tank

• Nitrogen: To prevent oxidation during mixing process. Blanketing the tanks. Nitrogen applied to partially filled tanks to displace oxygen.

• Tank cleaning: Automated clean and purge capability of tanks

• Plastic Materials: Built with FM4910 approved plastic materials

• Magnetically levitated low-shear pumps: No bearings to wear out, or seals to fail. Based on the principles of magnetic levitation

• The design incorporates pump redundancy (provides duplicate components) to reduce the stress and increase pump reliability.

• Drum scale: Continuous Monitoring

• Drum mixers: Pump recirculation  and also mixer.

• GEM/SECS communication

The Wall Box is GigaMat Technologies’ method for slurry system - polisher communication. The wall box provides slurry from the slurry system to the polisher, and is capable of precise flow control for up to five solutions. The wall box also has special rinse features that prevent contamination between any of the five solutions.