Semiconductor wafer manufacturing and processing equipment.

CUT COSTS. BOOST OUTPUT. OUTPERFORM.

FULLY AUTOMATED PROCESSING: Choose Dry in/Dry out OR Dry in/Wet out configurations

INDUSTRY-LEADING THROUGHPUT: Highest wafer productivity with lowest cost per wafer

ADVANCED REPLACEMENT TECHNOLOGY: Eliminates the need for expensive CMP processes

CMP Equipment

GigaMat Technologies offers a wide range of chemical-mechanical planarization (CMP) equipment ideal for many applications including silicon carbide, silicon, gallium arsenide, quartz, lithium niobate, sapphire, germanium and more.

Model 3808-LMD

NEW: Next-Gen Single Wafer CMP Technology

Chemical Delivery Systems

GigaMat Technologies' Chemical Delivery Systems automatically deliver slurry and other chemicals to various equipment, such as polishers and grinders.

0390-0890 Chemical Delivery System

Sorting & Metrology Equipment

GigaMat Technologies offers a variety of wafer sorting equipment that can sort based on multiple measurements, including thickness (optical or capacitance sensor), flatness (TTV), STIR, bow, warp, weight (for SiC), OCR, resistivity, and more.

Model 200-TRT

NEW: High-Throughput 400 Wafer/Hour Sorting System

Automation

GigaMat Technologies offers a CMP line of fully automated wafer manufacturing and processing equipment solutions.

CMP Powerhouse Automated Single wafer & Batch Process Tool

Advanced Batch & Single Wafer Automation Systems